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Inverse determination of the cutting force on nanoscale processing using atomic force microscopy

机译:使用原子力显微镜反演纳米加工中的切削力

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摘要

This study presents a means of calculating the cutting force during the nanomachining process using an atomic force microscope (AFM) cantilever. The determination of the cutting force in the machining system is regarded as an inverse vibration problem. The conjugate gradient method is applied to treat the inverse problem using available displacement measurements. Numerical results show that the method can accurately estimate the cutting force even for problems with error of displacement measurement. Furthermore, the initial guesses for the cutting force can be arbitrarily chosen and the computing time required for the inverse calculations takes less than one second using a Pentium III-450 MHz PC.
机译:这项研究提出了一种使用原子力显微镜(AFM)悬臂在纳米加工过程中计算切削力的方法。确定加工系统中的切削力被认为是反振动问题。共轭梯度法被用于使用可用的位移测量来处理反问题。数值结果表明,即使存在位移测量误差的问题,该方法也能准确估计切削力。此外,可以任意选择切削力的初始猜测值,并且使用奔腾III-450 MHz PC进行逆计算所需的计算时间不到一秒钟。

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