Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

G Abadal; Z J Davis; B Helbo

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Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

机译：用于高分辨率和高灵敏度质量检测的基于共振纳米悬臂的传感器的机电模型

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A simple linear electromechanical model for an electrostatically driven resonating cantiever is derived. The model has been developed in order to determine dynamic quantities such as the capacitive current flowing through the cantilever-driver system at the resonance frequency, and it allows us to calculate static magnitudes such as position and voltage of collapse or the voltage versus deflection characteristic. The model is used to demonstrate the theoretical sensitivity on the attogram scale of a mass sensor based on a nanometre-scale cantilever, and to analyse the effect of an extra feedback loop in the control circuit to increase the Q factor.

机译：推导了用于静电驱动谐振悬臂的简单线性机电模型。该模型的开发是为了确定动态量，例如在共振频率下流经悬臂驱动器系统的电容性电流，它使我们能够计算静态幅度，例如坍塌的位置和电压或电压与挠度的关系。该模型用于证明基于纳米级悬臂的质量传感器在惯性图上的理论灵敏度，并分析控制电路中额外反馈环路对提高Q因子的影响。

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《Nanotechnology》 |2001年第2期|共5页
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G Abadal; Z J Davis; B Helbo;
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Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

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