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Graphoepitaxial assembly of asymmetric ternary blends of block copolymers and homopolymers

机译:嵌段共聚物和均聚物的不对称三元共混物的石墨外延组装

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摘要

Ternary blends of cylinder-forming polystyrene-block-poly(methyl methacrylate) block copolymers and polystyrene and poly(methyl methacrylate) homopolymers were assembled in trench features of constant width. Increasing the fraction of homopolymer in the blend increased the spacing and size of block copolymer domains, which were oriented perpendicular to the substrate to form a hexagonal lattice within the trench. The number of rows of cylinders within the trench was controlled by the blend composition. Depending on the domain size and spacing, the hexagonal lattice was stretched or compressed perpendicular to the trench walls but not perturbed parallel to the walls, indicating a decoupling of the perturbation in the perpendicular and parallel directions. The row spacing was uniform across the trench as a function of position from the trench wall. The results are compared with an analytical model and with Monte Carlo simulations.
机译:在恒定宽度的沟槽特征中,组装成圆柱状的聚苯乙烯-嵌段-聚(甲基丙烯酸甲酯)嵌段共聚物与聚苯乙烯和聚(甲基丙烯酸甲酯)均聚物的三元共混物。增加共混物中均聚物的比例会增加嵌段共聚物域的间距和尺寸,这些嵌段共聚物域垂直于基材定向以在沟槽内形成六边形晶格。沟槽内圆柱的行数由混合成分控制。取决于畴的大小和间距,六角形晶格垂直于沟槽壁被拉伸或压缩,但不平行于壁而受到扰动,表明扰动在垂直方向和平行方向上解耦。整个沟槽的行距是均匀的,这是距沟槽壁的位置的函数。将结果与分析模型和蒙特卡洛模拟进行比较。

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