Nano-strip grating lines self-organized by a high speed scanning CW laser

Kaneko S.; Ito T.; Akiyama K.; Yasui M.; Kato C.; Tanaka S.; Hirabayashi Y.; Mastuno A.; Nire T.; Funakubo H.; Yoshimoto M.

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Nano-strip grating lines self-organized by a high speed scanning CW laser

机译：高速扫描连续激光自组织的纳米带光栅线

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After a laser annealing experiment on Si wafer, we found an asymmetric sheet resistance on the surface of the wafer. Periodic nano-strip grating lines (nano-SGLs) were self-organized along the trace of one-time scanning of the continuous wave (CW) laser. Depending on laser power, the nano-trench formed with a period ranging from 500 to 800nm with a flat trough between trench structures. This simple method of combining the scanning laser with high scanning speed of 300mmin~(-1) promises a large area of nanostructure fabrication with a high output. As a demonstration of the versatile method, concentric circles were drawn on silicon substrate rotated by a personal computer (PC) cooling fan. Even with such a simple system, the nano-SGL showed iridescence from the concentric circles.

机译：在硅晶片上进行激光退火实验后，我们在晶片表面发现了不对称的薄层电阻。沿着连续波（CW）激光的一次扫描轨迹，周期性地组织了纳米带状光栅线（nano-SGL）。根据激光功率，形成的纳米沟槽的周期在500至800nm之间，沟槽结构之间具有平坦的沟槽。这种将扫描激光器与300mmin〜（-1）的高扫描速度相结合的简单方法，有望在大面积的纳米结构制造中实现高输出。为了演示这种通用方法，在由个人计算机（PC）冷却风扇旋转的硅基板上绘制了同心圆。即使使用这种简单的系统，纳米SGL仍会显示出同心圆的虹彩。

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《Nanotechnology》 |2011年第17期|共6页
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Kaneko S.; Ito T.; Akiyama K.; Yasui M.; Kato C.; Tanaka S.; Hirabayashi Y.; Mastuno A.; Nire T.; Funakubo H.; Yoshimoto M.;
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1. Nano-strip grating lines self-organized by a high speed scanning CW laser [J] . Kaneko S., Ito T., Akiyama K., Nanotechnology . 2011,第17期

机译：高速扫描连续激光自组织的纳米带光栅线
2. Double-Layered Vibratory Grating Scanners for High-Speed High-Resolution Laser Scanning [J] . Du Y.Zhou G.Cheo K. L.Zhang Q.Feng H.Chau F. S. Microelectromechanical Systems, Journal of . 2010,第5期

机译：双层振动光栅扫描仪，用于高速高分辨率激光扫描
3. A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique [J] . Yu Du, Guangya Zhou, Kelvin Koon Lin Cheo, Journal of Micromechanics and Microengineering . 2010,第11期

机译：高速MEMS光栅激光扫描仪，具有使用单掩模延迟蚀刻技术制造的背面减薄的光栅平台
4. Periodic nano trench structure fabricated by high speed scanning CW laser [C] . Satoru Kaneko, Takeshi Ito, Manabu Yasui, Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XVII . 2012

机译：高速扫描连续激光制备的周期性纳米沟槽结构
5. Growth of indium gallium arsenide/gallium arsenide self-organized quantum dots and their application to high-speed lasers and spin-polarized light sources. [D] . Ghosh, Siddhartha. 2003

机译：砷化铟镓/砷化镓自组织量子点的生长及其在高速激光器和自旋偏振光源中的应用。
6. Simultaneous imaging of human cone mosaic with adaptive optics enhanced scanning laser ophthalmoscopy and high-speed transversal scanning optical coherence tomography [O] . M. Pircher, R. J. Zawadzki, J. W. Evans, -1

机译：使用自适应光学增强扫描激光检眼镜和高速横向扫描光学相干断层扫描技术同时成像人锥状马赛克
7. R. Brinkmann, N. Koop, M. �zdemir, C. Alt, G. Sch�le, C.P. Lin, R. Birngruber ?Targeting of the retinal pigment epithelium (RPE) by means of a rapidly scanned continuous wave (CW) laser beam?.Lasers in Surgery and Medicine32 (4) 2003, 252-264 [O] . 2003

机译：R. Brinkmann，N.Koop，M.�zdemir，C.Alt，G. ScheLe，C.P. Lin，R. Birngruber？通过快速扫描的连续波（CW）激光束靶向视网膜颜料上皮（RPE）α。手术和Medicine32（4）2003,252-264
8. Laser-Based Diagnostic for Tracing Magnetic Field Lines in Spheromaks and Other Self-Organized Magnetically Confined Plasmas [R] . McLean, H. S., Hill, D. N., Rutov, D. D., 2002

机译：用于跟踪球形磁场和其他自组织磁约束等离子体中磁场线的激光诊断

Nano-strip grating lines self-organized by a high speed scanning CW laser

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