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Hydrogen sensing properties of dielectrophoretically assembled SnO _2 nanoparticles on CMOS-compatible micro-hotplates

机译：在兼容CMOS的微热板上介电电泳组装SnO _2纳米粒子的氢感测特性

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摘要

We fabricated nanoparticle-based gas through in situ ac dielectrophoretical assembling of drop-coated SnO_2 nanoparticles to bridge the gap between electrodes with high aspect ratio. While the conventional dielectrophoresis (DEP) adopts a microfluidic system for continuous flow of the solution during the process, we just drop-coated a small amount of solution onto the electrodes and executed in situ DEP for a very short time. This is a very simple, cost-effective, time-saving, and highly reproducible process. We fixed the duration time and applied voltage for the DEP at 1s and 1V respectively and changed the frequencies from 1 up to 500kHz. I-V characteristics of the samples were checked and it was found that DEP samples fabricated at 1s, 1V and 150kHz conditions showed considerably higher connectivity of the nanoparticles. This can be attributed to the excellent step coverage achieved by ac DEP under those conditions. The devices drop-coated and dielectrophoretically assembled at other ac frequency conditions showed poor connectivity. Hydrogen gas sensing properties of the sensors fabricated under 1s, 1V and 150kHz conditions were checked by flowing through 160ppm H_2. The sensitivity reaches a maximum value of ～ 700% at 350 °C. The response time is ～ 200s at 350 °C.
机译：我们通过滴涂的SnO_2纳米粒子的原位交流电电泳组装以弥合高纵横比电极之间的间隙来制造基于纳米粒子的气体。尽管常规介电电泳（DEP）在过程中采用微流体系统使溶液连续流动，但我们只是将少量溶液滴涂到电极上，并在很短的时间内原位执行DEP。这是一个非常简单，经济高效，省时且可高度重复的过程。我们将DEP的持续时间和施加电压分别固定为1s和1V，并将频率从1更改为500kHz。检查了样品的I-V特性，发现在1s，1V和150kHz条件下制备的DEP样品显示出相当高的纳米颗粒连通性。这可以归因于在这些条件下通过ac DEP实现的出色阶梯覆盖。在其他交流频率条件下滴涂和介电泳组装的器件显示出较差的连接性。通过流过160ppm H_2来检查在1s，1V和150kHz条件下制造的传感器的氢气感测特性。灵敏度在350°C时达到约700％的最大值。在350°C时响应时间为〜200s。

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