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Reduced contact resistance between an individual single-walled carbon nanotube and a metal electrode by a local point annealing

机译:通过局部点退火降低单个单壁碳纳米管和金属电极之间的接触电阻

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摘要

The achievement of low-resistance contact is a key requirement for carbon-electrode electronics. In this study, we have obtained contacts with very low resistance between an individual single-walled carbon nanotube (SWNT) and palladium (Pd) electrodes using electric-current-induced Joule heating without destroying the field effect transistor device that these form. The SWNT is deposited onto Pd electrodes prepatterned on a SiO_2/Si substrate, through which an electrical pulse is applied for a microsecond duration. As a result, the source-drain current through the SWNT is greatly increased owing to the elimination of tunnelling barriers between the SWNT and the electrodes. In the case of semiconducting SWNTs, the Schottky barrier is estimated to increase slightly after pulse annealing in some cases, resulting in a relatively high resistance and asymmetrical current-voltage characteristics.
机译:低电阻接触的实现是碳电极电子产品的关键要求。在这项研究中,我们使用电流感应焦耳加热技术在单个单壁碳纳米管(SWNT)和钯(Pd)电极之间获得了非常低电阻的接触,而不会破坏这些形式的场效应晶体管器件。将SWNT沉积到预先在SiO_2 / Si基板上预图案化的Pd电极上,通过该电极施加微秒的电脉冲。结果,由于消除了SWNT与电极之间的隧穿势垒,大大增加了通过SWNT的源极-漏极电流。对于半导体SWNT,在某些情况下,估计在脉冲退火之后,肖特基势垒会略有增加,从而导致相对较高的电阻和不对称的电流-电压特性。

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