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Nano-fabrication with metallic glass-an exotic material for nano-electromechanical systems

机译：金属玻璃的纳米加工-一种用于纳米机电系统的特殊材料

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摘要

Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (DELTA T_x = 95 K), very smooth surface (R_a = 0.2 nm) and high value of Vickers hardness (H_v = 940) were deposited by sputtering. The microano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern approx12 nm), as well as by the imprint lithography technique (smallest feature approx 34 nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two- or three-dimensional components for future nano-electromechanical systems.
机译：通过溅射沉积具有较大的过冷液体区域（ΔT_x = 95 K），非常光滑的表面（R_a = 0.2 nm）和高维氏硬度（H_v = 940）的Zr-Al-Cu-Ni玻璃态薄膜。 。通过聚焦离子束蚀刻（最小的图案约为12 nm）以及压印光刻技术（最小的特征约为34 nm）证明了这些膜的微/纳米图案形成能力。这些具有很好的机械和化学性能的玻璃状薄膜，加上可与硅集成电路技术集成的超强纳米图案形成能力，有望为未来的纳米机电系统制造各种二维或三维组件。

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