Well-ordered nanopore arrays in rutile TiO_2 single crystals by swift heavy ion-beam lithography

R Sanz; J Jensen; A Johansson

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Well-ordered nanopore arrays in rutile TiO_2 single crystals by swift heavy ion-beam lithography

机译：快速重离子束光刻技术在金红石TiO_2单晶中的有序纳米孔阵列

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Ion track lithography has been applied for transferring the self-ordered nanopattern of porous anodic alumina to single-crystalline rutile TiO_2 substrates. As a result, nanometre resolved arrays have been fabricated with an aspect ratio ranging from 5 to 16, over areas of several square millimetres. Differences in the expected aspect ratio of the resulting nanopores in rutile TiO_2 single crystals are analysed and discussed. Some of these differences may be ascribed to varying densities of the mask material.

机译：离子轨道光刻技术已被用于将多孔阳极氧化铝的自定序纳米图案转移到单晶金红石TiO_2衬底上。结果，已经在几平方毫米的面积上制造了宽高比为5到16的纳米分辨阵列。分析并讨论了金红石型TiO_2单晶中所得纳米孔的预期长径比的差异。这些差异中的一些可以归因于掩模材料的变化的密度。

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《Nanotechnology》 |2007年第30期|共6页
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R Sanz; J Jensen; A Johansson;
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1. Well-ordered nanopore arrays in rutile TiO_2 single crystals by swift heavy ion-beam lithography [J] . R Sanz, J Jensen, A Johansson Nanotechnology . 2007,第30期

机译：快速重离子束光刻技术在金红石TiO_2单晶中的有序纳米孔阵列
2. Fabrication of well-ordered high-aspect-ratio nanopore arrays in TiO2 single crystals [J] . Sanz R, Johansson A, Skupinski M, Nano letters . 2006,第5期

机译：TiO2单晶中有序的高纵横比纳米孔阵列的制备
3. Structure of latent tracks in rutile single crystal of titanium dioxide induced by swift heavy ions [J] . Koichi Awazu, Xiaomin Wang, Makoto Fujimaki, Journal of Applied Physics . 2006,第4期

机译：快速重离子诱导的金红石型二氧化钛单晶中潜迹的结构
4. Three-Dimensional Lithography for Rutile TiO_2 Single Crystals using Swift Heavy Ions [C] . Koichi Awazu, Makoto Fujimaki, Yoshimichi Ohki, Symposium on Engineered Porosity for Microphotonics and Plasmonics; 20031202-20031204; Boston,MA; US . 2003

机译：快速重离子法制备金红石型TiO_2单晶的三维光刻
5. Investigation of Single Crystal Diamond for Swift Heavy Ion Beam Detectors and Study of Diamond Growth for Improvement of Diamond Material for Detectors [D] . Bhattacharya, Ayan 2018

机译：快速重离子束探测器的单晶金刚石研究及改进金刚石材料的金刚石生长研究
6. Formation of swift heavy ion tracks on a rutile TiO2 (001) surface [O] . Marko Karlušić, Sigrid Bernstorff, Zdravko Siketić, -1

机译：在金红石型TiO2（001）表面上形成快速重离子轨道
7. Combined investigation of water sorption on $TiO_2$ rutile (1 1 0) single crystal face: XPS vs. periodic DFT [O] . Perron, H., Vandenborre, J., Domain, C., 2007

机译：在$ TiO_2 $金红石（1 1 0）单晶面上吸水的综合研究：XPS与周期性DFT
8. Fast Diffusion of Iron in Single Crystal Rutile and Iron Doped Rutile [R] . Sasaki, J., Peterson, N. L., DeJonghe, L. C. 1983

机译：单晶金红石和铁掺杂金红石中铁的快速扩散

Well-ordered nanopore arrays in rutile TiO_2 single crystals by swift heavy ion-beam lithography

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