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Synthesis of oxidation-resistant metal nanoparticles via atomic layer deposition

机译：原子层沉积法合成抗氧化金属纳米粒子

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Oxidation-resistant iron nanoparticles were produced via the decomposition of iron oxalate particles followed by in situ passivation with ultrathin alumina films deposited by atomic layer deposition (ALD). Decomposition and passivation were carried out in a fluidized bed reactor at low pressure and under mechanical agitation. Films were deposited using self-limiting, sequential surface reactions of trimethylaluminium and water. Thermo-gravimetric studies determined that two different mechanisms were involved in the decomposition of iron oxalate. The iron nanoparticles were highly pure as verified by x-ray diffraction (XRD) and energy dispersive spectroscopy (EDS). Reduction of particle size was achieved via a cryogenic milling process and enhanced by the natural breakage of porous oxalate particles during processing. Synthesized iron particles had a primary size in the range of 50-80 nm. As demonstrated by high-resolution transmission electron microscopy (HRTEM), highly conformal alumina films were deposited on individual nanoparticles with an average growth rate of 0.16 nm/cycle. Superior oxidation resistance at 427 deg C was achieved after particles were coated with an 8 nm alumina film. After the coating process, the particles were ferromagnetic.
机译：通过分解草酸铁颗粒，然后用通过原子层沉积（ALD）沉积的超薄氧化铝膜原位钝化来生产抗氧化的铁纳米颗粒。在流化床反应器中在低压和机械搅拌下进行分解和钝化。使用三甲基铝和水的自限性顺序表面反应沉积薄膜。热重研究确定草酸铁的分解涉及两种不同的机理。通过X射线衍射（XRD）和能量色散光谱（EDS）验证，铁纳米粒子具有很高的纯度。颗粒尺寸的减小是通过低温研磨工艺实现的，并且在加工过程中由于多孔草酸盐颗粒的自然断裂而增强了粒径。合成的铁颗粒的初级尺寸在50-80nm范围内。如高分辨率透射电子显微镜（HRTEM）所示，高度共形的氧化铝膜以0.16 nm /周期的平均生长速度沉积在单个纳米颗粒上。用8 nm氧化铝膜涂覆颗粒后，在427℃时具有出色的抗氧化性。在涂覆过程之后，颗粒是铁磁性的。

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