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Nano-oxidation and in situ faradaic current detection using dynamic carbon nanotube probes

机译：使用动态碳纳米管探针的纳米氧化和原位法拉第电流检测

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Carbon nanotube-attached atomic force microscope probes were successfully used without nanotube bending to make simultaneous precision nano-oxidation and faradaic current measurements in the dynamic mode. Probe oxidation on H-passivated Si(001) surfaces was carried out by two methods involving vector-scan and raster-scan with a much higher resolution and precision compared to the nanofabrication by standard cantilevers. Faradaic current of the order of a sub-picoampere was detected during nano-oxidation using a carbon nanotube probe, accurately reflecting the subtle difference in the oxidation reaction. The minute current detection through the AFM tip is sensitive enough for the detection of very thin oxides and small-sized features. The dimension of the meniscus during nano-oxidation, which is indispensable for establishing the mechanism model, was evaluated, based on the in situ faradaic current detection and edge broadening.
机译：成功地使用了附有碳纳米管的原子力显微镜探针，无需弯曲纳米管，即可在动态模式下同时进行精确的纳米氧化和法拉第电流测量。 H钝化的Si（001）表面上的探针氧化是通过两种方法进行的，包括矢量扫描和光栅扫描，与通过标准悬臂梁进行纳米加工相比，其分辨率和精度更高。使用碳纳米管探针在纳米氧化过程中检测到了亚皮安级量级的法拉第电流，可准确反映出氧化反应中的细微差别。通过AFM尖端的微小电流检测足够灵敏，可以检测非常薄的氧化物和小尺寸特征。基于原位法拉第电流检测和边缘展宽，评估了纳米氧化过程中弯液面的尺寸，这对于建立机理模型是必不可少的。

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