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Templated-assembly of conducting antimony cluster wires

机译:导电锑簇线的模板组装

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Wires with meso- and nanoscale widths have been fabricated using a novel assembly technique based on the deposition of Sb clusters on templated surfaces. The template elements are V-grooves etched into the surface of a Si wafer. It is demonstrated that the clusters bounce or slide to the apex of the V-grooves, without significant fragmentation, and that this motion is the underlying mechanism behind the formation of the wires. The flow rate of inert gas into the cluster growth chamber controls the average velocity of the clusters and the morphology and width of the wires. Sb cluster-assembled wires with lengths over 150 mu m and widths down to 100 nm have been assembled from approx 40 nm diameter Sb clusters. Electrical contacts to the wires have been achieved via lithographic alignment of NiCr/Au contacts to the V-grooves prior to deposition.
机译:具有中等和纳米级宽度的金属丝已经使用一种新颖的组装技术制造,该技术基于Sb团簇在模板表面上的沉积。模板元素是蚀刻到Si晶片表面的V型槽。结果表明,团簇反弹或滑动到V型槽的顶点,而没有明显的碎裂,并且这种运动是导线形成背后的潜在机制。进入团簇生长室的惰性气体流速控制团簇的平均速度以及金属丝的形态和宽度。由直径约40 nm的Sb簇组装而成的Sb簇组装线的长度超过150微米,宽度低至100 nm。通过在沉积之前将NiCr / Au触点平版对准V形槽,可以实现与导线的电接触。

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