A new scanning electron microscopy approach to image aerogels at the nanoscale

Solá F.; Hurwitz F.; Yang J.

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A new scanning electron microscopy approach to image aerogels at the nanoscale

机译：一种新的扫描电子显微镜方法，可在纳米级成像气凝胶

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A new scanning electron microscopy (SEM) technique to image poor electrically conductive aerogels is presented. The process can be performed by non-expert SEM users. We showed that negative charging effects on aerogels can be minimized significantly by inserting dry nitrogen gas close to the region of interest. The process involves the local recombination of accumulated negative charges with positive ions generated from ionization processes. This new technique made possible the acquisition of images of aerogels with pores down to approximately 3nm in diameter using a positively biased Everhart-Thornley (ET) detector.

机译：提出了一种新的扫描电子显微镜（SEM）技术来对不良的导电气凝胶成像。该过程可以由非专业SEM用户执行。我们表明，通过在感兴趣的区域附近插入干燥的氮气，可以显着减小对气凝胶的负电荷影响。该过程涉及累积的负电荷与电离过程产生的正离子的局部重组。这项新技术使得使用正偏置的Everhart-Thornley（ET）检测器可以采集直径小于3nm的孔的气凝胶图像。

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《Nanotechnology》 |2011年第17期|共6页
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Solá F.; Hurwitz F.; Yang J.;
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1. A new scanning electron microscopy approach to image aerogels at the nanoscale [J] . Solá F., Hurwitz F., Yang J. Nanotechnology . 2011,第17期

机译：一种新的扫描电子显微镜方法，可在纳米级成像气凝胶
2. Systematic features of defocused images in scanning electron microscopy and nanoscale size measurements [J] . Maksimov K.S. Semiconductors . 2009,第13期

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A new scanning electron microscopy approach to image aerogels at the nanoscale

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