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Deconvolution processing for increasing the resolution of magnetic force microscopy measurements

机译：去卷积处理以提高磁力显微镜测量的分辨率

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摘要

Magnetic force microscopy (MFM) is a widely used form of scanning probe microscopy (SPM) that is used for obtaining a magnetic image from a surface with nanoscale resolution. Currently, the resolution of MFM is limited to approximately 20 nm due to the long-range nature of magnetic interactions between the MFM probe's tip and the magnetic medium. This paper describes an optimal signal processing solution to the problem of achieving high resolution MFM with the goal of significantly exceeding the level at which MFM metrology currently performs, thus providing metrologists with a means of resolution increase that is believed will enable, for example, the rapid development of high-density magnetic recording media (> 100 Gbit in(-2)). This is achieved by using focused-ion beam trimming of a conventional tip to create a probe tip of predictable magnetic characteristics and then, provided that the sample could be approximated as a thin-film, using knowledge of this tip's sensitivity field for performing a deconvolution on the measured signal to better estimate the magnetic state of the surface under study. Stated differently, as the MFM measured signal is modelled as the convolution of the magnetized surface and the tip's sensitivity field, we exploit knowledge of the tip's properties to increase the resolution of the MFM image. Details of the deconvolution approach as well as images resulting from this processing are the focus of this paper.
机译：磁力显微镜（MFM）是扫描探针显微镜（SPM）的一种广泛使用形式，用于从具有纳米级分辨率的表面获取磁图像。当前，由于MFM探针的尖端与磁性介质之间的磁性相互作用的远距离特性，MFM的分辨率被限制为大约20 nm。本文介绍了一种用于实现高分辨率MFM问题的最佳信号处理解决方案，其目标是大大超过MFM度量标准的当前水平，从而为计量学家提供一种提高分辨率的方法，据信这将使例如高密度磁记录介质（> 100 Gbit in（-2））的快速发展。这是通过使用常规探针的聚焦离子束微调来创建具有可预测磁特性的探针探针，然后在假定样本可以近似为薄膜的情况下使用该探针的灵敏度场知识来执行去卷积来实现的。可以更好地估计所研究表面的磁状态。换句话说，由于将MFM测量信号建模为磁化表面和尖端灵敏度场的卷积，因此我们利用尖端特性的知识来提高MFM图像的分辨率。反卷积方法的详细信息以及由此处理产生的图像是本文的重点。

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