• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Nanotechnology >Growth of two-dimensional arrays of silicon nanocrystals in thin SiO_2 layers by low pressure chemical vapour deposition and high temperature annealing/oxidation. Investigation of their charging properties
【24h】

Growth of two-dimensional arrays of silicon nanocrystals in thin SiO_2 layers by low pressure chemical vapour deposition and high temperature annealing/oxidation. Investigation of their charging properties

机译：通过低压化学气相沉积和高温退火/氧化在薄SiO_2层中生长硅纳米晶体的二维阵列。研究其充电特性

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Two-dimensional arrays of silicon nanocrystals embedded in ultrathin SiO_2 layers for application in silicon nanocrystal memories were fabricated by a three-step process: (a) growth of a tunnelling silicon oxide, (b) low pressure chemical vapour deposition (LPCVD) of a thin layer of amorphous silicon (alpha-Si), and (c) solid phase crystallization of the a-Si layer in a high temperature furnace under nitrogen flow, followed by thermal oxidation in the same furnace. Transmission electron microscopy (TEM) was used for the structural characterization of the three-layer structure and the determination of layer thicknesses and silicon nanocrystal size, while capacitance-voltage (C-V) and current-voltage (I-V) measurements were used to investigate the charging properties of the silicon nanocrystal layer. In an attempt to increase the silicon nanocrystal density, as suggested in the literature, a dip of the oxidized wafer in diluted HF before LPCVD deposition was used, but this step was found to seriously affect the charging properties of the structure.
机译：通过三步工艺制造嵌入在超薄SiO_2层中的硅纳米晶体的二维阵列，以用于硅纳米晶体存储器：（a）隧穿氧化硅的生长;（b）硅的低压化学气相沉积（LPCVD）。薄层非晶硅（α-Si），以及（c）在高温炉中在氮气流下a-Si层进行固相结晶，然后在同一炉中进行热氧化。透射电子显微镜（TEM）用于三层结构的结构表征以及层厚度和硅纳米晶体尺寸的确定，而电容-电压（CV）和电流-电压（IV）测量用于研究充电硅纳米晶体层的性质。为了增加硅纳米晶体的密度，如文献中所建议的，使用了氧化的晶片在LPCVD沉积之前浸入稀释的HF中，但是发现该步骤会严重影响结构的带电性能。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号