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A new method for characterizing nonlinearity in scanning probe microscopes using digital image correlation

机译：利用数字图像相关性表征扫描探针显微镜非线性的新方法

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摘要

It is essential to characterize the nonlinearity in scanning probe microscopes (SPMs) in order to acquire spatial measurements with high levels of accuracy. In this paper, a new characterization method is presented that combines a high-resolution image processing technique used by the experimental mechanics community known as Digital Image Correlation (DIC) with digital images from a standard type of SPM known as an atomic force microscope (AFM). The characterization results using this new method match those from the conventional method using micromachined calibration gratings. However, the new method uses the texture of a specimen surface and not a precisely micromachined calibration grating. As a consequence, the new characterization technique is a more direct method for measuring scanning errors that can be conducted in situ when imaging a specimen surface at any scale within the scanning range of the SPM. It also has the advantage of reconstructing the position error curve more continuously with less noise than the conventional method.
机译：表征扫描探针显微镜（SPM）中的非线性是必不可少的，以便获得高度准确的空间测量结果。在本文中，提出了一种新的表征方法，该方法将实验力学界使用的高分辨率图像处理技术（称为数字图像相关性（DIC））与标准类型的SPM的数字图像（称为原子力显微镜（AFM））相结合）。使用这种新方法的表征结果与使用微机械校准光栅的常规方法的表征结果相匹配。但是，新方法使用的是样品表面的纹理，而不是精确的微加工校准光栅。结果，新的表征技术是一种更直接的测量扫描误差的方法，当在SPM的扫描范围内以任何比例对样本表面成像时，可以就地进行扫描误差。与传统方法相比，它还具有以更少的噪声更连续地重建位置误差曲线的优点。

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