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首页> 外文期刊>Nanotechnology >Low adhesive force of fluorinated sol-gel hybrid materials for easy de-moulding in a UV-based nano-imprint process
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Low adhesive force of fluorinated sol-gel hybrid materials for easy de-moulding in a UV-based nano-imprint process

机译：氟化溶胶-凝胶杂化材料的低粘合力，可在基于紫外线的纳米压印工艺中轻松脱模

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摘要

A fluorinated methacryl hybrid material, with low surface tension, was used as an imprinting material for easy de-moulding in a UV-based nano-imprint process. Specifically, a method to measure the adhesive force between the poly(dimethylsiloxane) (PDMS) mould and the imprinting material, using the force-distance curve of PDMS, was suggested to represent the de-mouldability of the PDMS mould in a UV-based nano-imprint process. The fluorinated methacryl hybrid material exhibited a low adhesive force to PDMS, as well as low surface tension, and could be nano-imprinted without using an anti-sticking treatment on the PDMS mould.
机译：具有低表面张力的氟化甲基丙烯酸杂化材料被用作压印材料，以便在基于UV的纳米压印工艺中轻松脱模。具体而言，建议一种使用PDMS的力-距离曲线测量聚二甲基硅氧烷（PDMS）模具与压印材料之间的粘合力的方法，以代表PDMS模具在基于UV的情况下的脱模性纳米压印工艺。氟化甲基丙烯酸杂化材料对PDMS的粘附力低，并且表面张力低，可以在不对PDMS模具进行防粘处理的情况下进行纳米压印。

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