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Micromachining using high-power picosecond lasers

机译:使用大功率皮秒激光器的微加工

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摘要

For the micromachining of temperature-sensitive and brittle-rigid components ultra short pulsed lasers are being used more and more. Due to the short pulse durations in the femto- and pico second range such systems with only a few Watt of average power have high pulsed peak powers of an order of 10 MW. This allows machining a wide range of materials including transparent materials via non-linear absorption, enabled by the high intensity in the focus of radiation. The intensity can reach values of several TW/cm2. This leads to the immediate evaporation of the material, ideally, without melt and burr.
机译:为了对温度敏感和脆性部件进行微加工,越来越多地使用超短脉冲激光器。由于在飞秒和皮秒级范围内的脉冲持续时间短,因此平均功率只有几瓦的此类系统具有约10 MW的高脉冲峰值功率。这可以通过辐射吸收的高强度实现非线性吸收,从而加工包括透明材料在内的各种材料。强度可以达到几TW / cm2的值。理想地,这导致材料立即蒸发,而没有熔化和毛刺。

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