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首页> 外文期刊>Laser Technik Journal >Femtosecond vs. Picosecond Laser Material Processing Challenges in Ultrafast Precision Laser Micromachining of Metals at High Repetition Rates
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Femtosecond vs. Picosecond Laser Material Processing Challenges in Ultrafast Precision Laser Micromachining of Metals at High Repetition Rates

机译：飞秒与皮秒激光材料加工在高重复率的金属超快精密激光微加工中的挑战

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摘要

Laser materials processing has been an intensive research topic since the invention of the laser. Nowadays, lasers are used as efficient and qualified tools in many industrial processes, like heavy industrial cutting, hardening, and welding. However, as the miniaturization of components and devices is progressing, finer structures are required. Here, the flexible laser processing with conventional laser sources is typically limited by thermal or mechanical damage (melting, formation of burr and cracks, changes in the morphology etc.), which is especially true if metals have to be processed. In order to overcome these limitations and to minimize collateral damage various research activities based on the use of ultrashort laser pulses with picosecond or femtosecond duration have been started in the early 1990s (e.g. [1-8]).
机译：自从激光发明以来，激光材料加工一直是研究的重点。如今，激光已在许多工业过程中用作高效且合格的工具，例如重工业切削，淬火和焊接。然而，随着组件和设备的小型化的发展，需要更精细的结构。在此，利用常规激光源进行的柔性激光加工通常受到热或机械损伤（熔化，毛刺和裂纹的形成，形态变化等）的限制，如果必须加工金属，则尤其如此。为了克服这些限制并最大程度地减少附带损害，在1990年代初期开始了各种基于皮秒或飞秒持续时间的超短激光脉冲的研究活动（例如[1-8]）。

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