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首页> 外文期刊>RSC Advances >A general electrodeposition-based method for in situ construction of resistive-type semiconductor film gas-sensor with excellent sensing performance
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A general electrodeposition-based method for in situ construction of resistive-type semiconductor film gas-sensor with excellent sensing performance

机译：基于电沉积的原位电阻性能优异的电阻式半导体薄膜气体传感器的原位构建方法

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摘要

For the construction of a resistive-type gas-sensor, it is usually required for a sensing film to be fabricated on a non-conductive substrate. The in situ construction of a sensor by subjecting the substrate to an electrodeposition method is impossible and there have been no related reports on this. Herein, taking the in situ construction of a SnO2 film sensor as an example, a novel electrodeposition-based method was introduced. A conductive graphite coating was firstly fabricated on the non-conductive substrate for the implementation of the electrodeposition, and then a calcining process was employed. The conductive pristine graphite coating was found to become non-conductive after being calcined for more than 70 min at 500 degrees C, resulting in the final electrodeposited film being able to work as a sensing film. Some important parameters related to the sensing performances, including the formation, the conductivity, the electrodeposition time, the calcining time and the working temperature, were systematically studied. Under the optimal conditions, the SnO2 film sensor exhibited high sensitivity, a fast response and recovery, and long-term stability in the detection of ethanol gas with concentrations ranging between 1-100 ppm. The electrodeposition-based method is reproducible, mass-productive and general. It is therefore practical and promising for the construction of various semiconductor film sensors.
机译：为了构造电阻型气体传感器，通常需要在非导电基板上制造感测膜。通过使基板经受电沉积方法来原位构造传感器是不可能的，并且对此没有相关报道。在此，以SnO2薄膜传感器的原位构造为例，介绍了一种新颖的基于电沉积的方法。首先在非导电衬底上制备导电石墨涂层以进行电沉积，然后采用煅烧工艺。发现导电原始石墨涂层在500摄氏度下煅烧70分钟以上后变得不导电，从而使最终的电沉积膜能够用作传感膜。系统地研究了一些与传感性能有关的重要参数，包括形貌，电导率，电沉积时间，煅烧时间和工作温度。在最佳条件下，SnO2薄膜传感器在浓度范围为1-100 ppm的乙醇气体检测中表现出高灵敏度，快速响应和恢复以及长期稳定性。基于电沉积的方法是可重现的，可大量生产且通用的。因此，对于各种半导体膜传感器的构造是实用且有希望的。

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