Amorphous lithium-silicon compounds are promising materials in order to improve pure silicon as a high-capacity anode material in lithium-ion batteries. We demonstrated that it is possible to produce amorphous LixSi (x approximate to 0.4) thin films by reactive ion-beam co-sputtering of a segmented solid state target composed of metallic lithium and elemental silicon. At the surface a graded LixSiOy layer of some nanometer thickness is formed by contact with air which seems to prevent decomposition of the LixSi.
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