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Semi-transparent silicon-rich silicon carbide photovoltaic solar cells

机译:半透明富硅碳化硅光伏太阳能电池

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All silicon-rich silicon carbide (Si-rich SixC1-x)-based single p-i-n junction photovoltaic solar cells (PVSCs) were fabricated by growing nonstoichiometric Si-rich SixC1-x films through medium-temperature hydrogen-free plasma enhanced chemical vapor deposition. The Si-rich SixC1-x-based thin-film p-i-n junction PVSCs exhibit improved power conversion efficiency when an intrinsic Si-rich SixC1-x absorbing layer with a low C/Si composition ratio is added; amorphous Si (a-Si) particles are embedded in this absorbing layer. Lowering the [CH4]/[CH4 + SiH4] fluence ratio from 0.5 to 0.3 reduces the C/Si composition ratio of Si-rich SixC1-x films from 0.74 to 0.665. The absorbance of these films in the visible light region (400-800 nm) is substantially enhanced to 3.8 x 10(5) cm(-1) by reducing the [CH4]/[CH4 + SiH4] fluence ratio, which is up to one order of magnitude larger than that of crystalline Si. The open-circuit voltage and short-circuit current density of the indium tin oxide/p-SixC1-x/i-SixC1-xSi(x)C(1-x)/Al PVSCs are enhanced to 0.51 V and to 19.7 mA cm(-2), respectively, raising the conversion efficiency and filling factor to 2.24% and 0.264, respectively. Through hydrogen-free deposition of the Si-rich SixC1-x p-i-n cells on a-Si based p-i-n cells, Si-rich SixC1-x/a-Si hybrid tandem PVSCs exhibit enhanced conversion efficiency and an enhanced filling factor of 6.47% and 0.332, respectively.
机译:通过中温无氢等离子体增强化学气相沉积法生长非化学计量的富含Si的SixC1-x膜,制造了所有基于富含硅的碳化硅(Si富含SixC1-x)的单p-i-n结光伏太阳能电池(PVSC)。当添加具有低C / Si组成比的本征富含Si的SixC1-x吸收层时,富含Si的SixC1-x基薄膜p-i-n结PVSC表现出改进的功率转换效率。非晶Si(a-Si)颗粒嵌入该吸收层中。将[CH4] / [CH4 + SiH4]的注量比从0.5降低到0.3,会使富Si的SixC1-x膜的C / Si组成比从0.74降低到0.665。通过降低[CH4] / [CH4 + SiH4]的注量比,这些膜在可见光区域(400-800 nm)的吸收率基本上提高到3.8 x 10(5)cm(-1)。比晶体硅大一个数量级铟锡氧化物/ p-SixC1-x / i-SixC1-x / nSi(x)C(1-x)/ Al PVSC的开路电压和短路电流密度分别提高到0.51 V和19.7 mA cm(-2)分别将转换效率和填充系数分别提高到2.24%和0.264。通过在基于a-Si的pin电池上无硅沉积富含Si的SixC1-x pin电池,富含Si的SixC1-x / a-Si混合串联PVSC表现出增强的转化效率和6.47%和0.332的填充率, 分别。

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