New Microelectromechanical Cavities for Gigahertz Frequencies

E. G. Kostsov; S. I. Fadeev

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New Microelectromechanical Cavities for Gigahertz Frequencies

机译：千兆赫频率的新型微机电腔

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A possibility of creating micrometer-sized microelectromechanical cavities operating at gigahertz frequencies is considered. A thin film of a dielectric (ferroelectric) with a high dielectric permeability and electric strength is included into the cavity structure. Specific features of device operation and its structure are described by a mathematical model that allows one to find exact relations between the parameters characterizing natural oscillations of the moving element and the triggering voltage.

机译：考虑了创建以千兆赫频率工作的微米级微机电腔的可能性。具有高介电渗透性和电强度的电介质（铁电）薄膜被包括在腔结构中。一种数学模型描述了设备操作及其结构的特定特征，该数学模型允许人们找到表征运动元件自然振荡的参数与触发电压之间的精确关系。

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《Optoelectronics, Instrumentation and Data Processing》 |2013年第2期|共7页
作者
E. G. Kostsov; S. I. Fadeev;
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原文格式 PDF
正文语种 eng
中图分类仪器、仪表;
关键词
Microwave MEMS; Microcavity; Frequency generator; HF filter; Natural oscillations;

机译：微波MEMS;微腔;频率发生器;HF滤波器;自然振荡;

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1. 一种新型纳机电硅谐振器的频率响应特性 [J] . 于虹, 袁为民, 刘春胜, 东南大学学报（英文版） . 2012,第003期
2. New Microelectromechanical Cavities for Gigahertz Frequencies [J] . E. G. Kostsov, S. I. Fadeev Optoelectronics, Instrumentation and Data Processing . 2013,第2期

机译：千兆赫频率的新型微机电腔
3. Coupled Resonance Energy Transfer Over Gigahertz Frequency Range Using Ceramic Filled Cavity for Medical Implanted Sensors [J] . Wang W., Hemour S., Wu K. IEEE Transactions on Microwave Theory and Techniques . 2014,第4aPart2期

机译：使用陶瓷填充腔的医用植入传感器在千兆赫兹频率范围内的耦合共振能量传输
4. Polarization self-modulation at multi-gigahertz frequencies in an external-cavity semiconductor laser [J] . Loh W.H., Schremer A.T. IEEE Photonics Technology Letters . 1990,第7期

机译：外腔半导体激光器中几千兆赫频率的偏振自调制
5. Gigahertz Repetition Rate Ultrashort Laser Pulses from Coherent External Fabry-Pérot Cavity [C] . Tian Seng Chan, MHA Wahid, P. Poopalan International Conference on Applied Photonics and Electronics . 2020

机译：Gigahertz重复率超短型激光脉冲来自连贯的外部Fabry-Pérot腔
6. Gigahertz Modulation of a Photonic Crystal Cavity. [D] . Ali, Aaron Karim Taylor. 2013

机译：光子晶体腔的千兆赫兹调制。
7. Vertical-cavity surface-emitting laser sources for gigahertz-bandwidth multiwavelength frequency-domain photon migration [O] . Thomas D. O’Sullivan, Keunsik No, Alex Matlock, 2017

机译：垂直腔面发射激光源用于千兆赫带宽多波长频域光子迁移
8. Vertical-cavity surface-emitting laser sources for gigahertz-bandwidth, multiwavelength frequency-domain photon migration [O] . Thomas D. O’Sullivan 2017

机译：用于Gigahertz带宽的垂直腔表面发射激光源，多波长频域光子迁移

New Microelectromechanical Cavities for Gigahertz Frequencies

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