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首页> 外文期刊>Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter >A simple method of measuring and applying the dispersion of thin films
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A simple method of measuring and applying the dispersion of thin films

机译：一种测量和施加薄膜色散的简单方法

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摘要

The position and the separation of the adjacent maxima and minima of the interference bands of an amorphous hydrogenated silicon film doped with aluminum are used to determine the order value unambiguously, the optical thickness to accuracy ranging from eight parts in 10~(5) to one part in 10~(3), and the refractive index accurately to ±0.03 across a wide spectral interval 0.5-2.5 μm. The dependence of the film dispersion on the doping concentration is expressed in terms of a polynomial dispersion function whose coefficients vary with the doping concentration.
机译：掺杂铝的非晶氢化硅膜的干涉带的相邻最大值和最小值的位置和间距用于确定阶值，光学厚度的精度范围为10〜（5）的八分之一。在10〜（3）的范围内，折射率在0.5-2.5μm的宽光谱范围内精确到±0.03。膜色散对掺杂浓度的依赖性用多项式色散函数表示，该多项式色散函数的系数随掺杂浓度而变化。

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