Coherence Effects in Surface Roughness Induced by Vacuum Ultraviolet F_2 Laser Ablation

R E. Dyer; C. D. Walton; K. A. Akeel

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Coherence Effects in Surface Roughness Induced by Vacuum Ultraviolet F_2 Laser Ablation

机译：真空紫外线F_2激光烧蚀引起的表面粗糙度的相干效应

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We analyze statistical fluctuations in the pulse-to-pulse spatial fluence distribution of a highly multimode F_2laser beam and the influence that coherence effects have on the attainable smoothness of an ablated surface. The magnitude of fluctuations is predicted to be a few percent, with associated roughness increasing as m~1/2, where m is the number of ablation pulses. By use of a white-light optical interferometer, measurements have been made of roughness induced on N-BK7 glass surfaces ablated with a 157-nm laser, and reasonable agreement with predictions based on this roughening mechanism has been found.

机译：我们分析了高度多模F_2激光束的脉冲到脉冲空间注量分布中的统计波动以及相干效应对烧蚀表面可获得的平滑度的影响。波动的幅度预计为百分之几，并且相关的粗糙度会随着m〜1/2的增加而增加，其中m是消融脉冲的数量。通过使用白光光学干涉仪，已经对用157 nm激光烧蚀的N-BK7玻璃表面上引起的粗糙度进行了测量，并且已经发现与基于该粗糙化机制的预测合理地吻合。

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《Optics Letters》 |2005年第11期|共3页
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R E. Dyer; C. D. Walton; K. A. Akeel;
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中图分类光学;
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1. Coherence Effects in Surface Roughness Induced by Vacuum Ultraviolet F_2 Laser Ablation [J] . R E. Dyer, C. D. Walton, K. A. Akeel Optics Letters . 2005,第11期

机译：真空紫外线F_2激光烧蚀引起的表面粗糙度的相干效应
2. Effects of vacuum ultraviolet photons, ion energy and substrate temperature on line width roughness and RMS surface roughness of patterned 193nm photoresist [J] . Titus M.J., Graves D.B., Yamaguchi Y., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2011,第8期

机译：真空紫外光子，离子能量和衬底温度对图案化193nm光致抗蚀剂的线宽粗糙度和RMS表面粗糙度的影响
3. Nonlinear-optical vacuum ultraviolet generation at maximum atomic coherence controlled by a laser-induced Stark chirp of two-photon resonance [J] . Myslivets SA., Popov AK., Halfmann T., Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2002,第4a6期

机译：激光诱导的双光子共振斯塔克chi控制的最大原子相干非线性光学真空紫外线产生
4. Vacuum-ultraviolet Laser Induced Surface Modification Of Fused And Crystal Quartz [C] . Jie Zhang, Sugioka, K. . 1997

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5. Effects of surface roughness on palladium-silicon Schottky diode hydrogen sensors using laser ablation. [D] . Van Suetendael, Nancy Jean. 2008

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6. Optical coherence tomography characterizes the roughness and thickness of the heterogeneous layer on cortical bone surface induced by Er:YAG laser ablation at different moisture contents [O] . Wenyan Huang, Chudan Gao, Yintao Lan, 2020

机译：光学相干断层扫描表征在不同水分含量下Er：YAG激光烧蚀引起的皮质骨表面异质层的粗糙度和厚度
7. Laser Ablation. Ablation Using Vacuum-Ultraviolet Lasers. [O] . Koji SUGIOKA, Satoshi WADA, Hideo TASHIRO, 1997

机译：激光烧蚀。使用真空紫外线激光烧蚀。
8. Ultraviolet Femtosecond and Nanosecond Laser Ablation of Silicon: Ablation Efficiency and Laser-Induced Plasma Expansion [R] . Zong, X., Mao, X., Greif, R., 2005

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Coherence Effects in Surface Roughness Induced by Vacuum Ultraviolet F_2 Laser Ablation

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