Direct fabrication of physical relief structures via patterned photodeposition of a titanium alkoxide solution

J. David Musgraves; B. G. Potter; Timothy J. Boyle

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Direct fabrication of physical relief structures via patterned photodeposition of a titanium alkoxide solution

机译：通过图案化的烷氧基钛溶液光沉积直接制造物理浮雕结构

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Ultraviolet (lambda velence 248 nm) excitation of a photosensitive Ti alkoxide solution was found to generate a metal-oxide-based insoluble film on substrates in contact with the solution during illumination. Patterned deposition of 100 (mu)m wide lines of material was demonstrated using a slit-shaped aluminum shadow mask during exposure. Stylus profilometry confirmed that the average thickness of the photodeposited film monotonically varied with accumulated UV fluence, exhibiting thicknesses of 10 to 310 nm for fluences of 12 and 192 J/cm~(2), respectively. Moreover, the surface profile of the film surface at fluences greater than 12 J/cm~(2) was found to reproduce the near-field Fresnel diffraction pattern anticipated from the slit mask used.

机译：发现光敏的Ti醇盐溶液的紫外线（λvelence 248 nm）激发在照明过程中在与溶液接触的基材上产生基于金属氧化物的不溶膜。在曝光期间使用狭缝形的铝阴影掩模展示了图案化的100微米宽的材料线的沉积。触针轮廓仪证实，光沉积膜的平均厚度随累积的UV能量密度单调变化，对于12和192 J / cm〜（2）的能量密度分别显示10至310 nm的厚度。此外，发现在注量大于12J / cm 2（2）时膜表面的表面轮廓再现了从所使用的狭缝掩模预期的近场菲涅耳衍射图案。

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《Optics Letters》 |2008年第12期|共3页
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J. David Musgraves; B. G. Potter; Timothy J. Boyle;
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1. Direct fabrication of physical relief structures via patterned photodeposition of a titanium alkoxide solution [J] . J. David Musgraves, B. G. Potter, Timothy J. Boyle Optics Letters . 2008,第12期

机译：通过图案化的烷氧基钛溶液光沉积直接制造物理浮雕结构
2. Effect of Acetylacetone on Morphology and Crystalline Structure of Nanostructured TiO_2in Titanium Alkoxide Aqueous Solution System [J] . Keizo Nakagawa, Fumin Wang, Yusuke Murata, Chemistry Letters . 2005,第5期

机译：乙酰丙酮对烷氧基钛水溶液体系中纳米结构TiO_2的形貌和晶体结构的影响
3. beta-diketonate derivatives of titanium alkoxides: X-ray crystal structures and solution dynamics of the binuclear complexes [{Ti(OR)(3)(dik)}(2)] [J] . Errington RJ., Clegg W., Coxall RA., Polyhedron: The International Journal for Inorganic and Organometallic Chemistry . 1998,第5a6期

机译：钛醇盐的β-二酮酸酯衍生物：双核络合物的X射线晶体结构和溶液动力学[{Ti（OR）（3）（dik）}（2）]
4. Preparation of Barium Titanate Patterned Microstructures by a Novel Sol-Electrodeposition Method Using a Highly Concentrated Alkoxide Solution [C] . Tadasu Hosokura, Satoshi Shindo, Makoto Kuwabara Electronics Division Meeting of the Ceramic Society of Japan . 2003

机译：用高浓度醇盐溶液制备钛酸钡图案化微观结构的制备
5. Fabrication of titanium - 6-aluminum - 4-vanadium structures using direct metal deposition (DMD) process. [D] . Thomas, Arun. 2004

机译：使用直接金属沉积（DMD）工艺制造钛-6-铝-4-钒结构。
6. Crystal structures of a novel NNN pincer ligand and its dinuclear titanium(IV) alkoxide pincer complex [O] . Jakub Pedziwiatr, Ion Ghiviriga, Khalil A. Abboud, 2017

机译：一种新型NNN钳形配体的晶体结构及其双核钛醇盐钳形配合物
7. Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning [O] . Jeremy B. Reeves, Rachael K. Jayne, Lawrence Barrett, 2019

机译：通过直接激光写入和MEMS模板图案的整合制造多材料3D结构
8. Direct Fabrication of Patterned Functional Ceramic Films by Soft Solution Processing without Post-Firing. [R] . Yoshimura, M., Watanabe, T., Fujiware, T., 2003

机译：无需后烧制直接制备图案化功能陶瓷薄膜的软溶液加工。

Direct fabrication of physical relief structures via patterned photodeposition of a titanium alkoxide solution

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