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High-resolution confocal detection of nanometric displacement by use of a 2×1 optical fiber coupler

机译:使用2×1光纤耦合器高分辨率共聚焦检测纳米位移

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摘要

A novel high-resolution confocal measurement of nanometric displacement that uses a simple 2×1 optical fiber coupler is presented. The basic principle is to detect interferometrically the change in the phase difference between two adjacent input fibers of the coupler that results from the nonuniform wave-front curvature of the reflected light. Measurement of subnanometer axial modulation, which permits high-resolution displacement sensing by optical means, is demonstrated.
机译:提出了一种新颖的高分辨率纳米位移共焦测量,该测量使用了简单的2×1光纤耦合器。基本原理是通过干涉法检测耦合器的两个相邻输入光纤之间的相位差变化,该变化是由反射光的不均匀波前曲率引起的。演示了亚纳米轴向调制的测量,该测量允许通过光学手段进行高分辨率位移感测。

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