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首页> 外文期刊>Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic >Further improvement of edge location accuracy of double fiber spherical coupling sensor using orthogonal Jacobi-Fourier moments
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Further improvement of edge location accuracy of double fiber spherical coupling sensor using orthogonal Jacobi-Fourier moments

机译:利用正交雅可比-傅里叶矩进一步提高双光纤球形耦合传感器的边缘定位精度

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摘要

In order to further improve the edge location accuracy of double fiber spherical coupling sensor, an approach based on OJFMs is proposed. In this paper, OJFMs with high order spatial moment and simple calculation is built. Then, its edge location method and fast discrete algorithm is proposed. Finally, the proposed method is tested by locating the edge of standard pattern and the image acquired by double fiber spherical coupling sensor with lot of noise. Experiment results show that the location accuracy is up to 0.05 pixel and 0.08 pixel for standard lines and standard circle, respectively. The accuracy of double fiber spherical coupling sensor is 0.026 pixel in 2γ band and a actual accuracy of 36 nm is obtained by OJFMs after a moving average filter (N = 7).
机译:为了进一步提高双光纤球面耦合传感器的边缘定位精度,提出了一种基于OJFM的方法。本文建立了具有高阶空间矩且计算简单的OJFM。然后,提出了其边缘定位方法和快速离散算法。最后,通过定位标准图案的边缘和双光纤球形耦合传感器采集的图像,对噪声较大的方法进行了测试。实验结果表明,标准线和标准圆的定位精度分别达到0.05像素和0.08像素。双纤维球形耦合传感器的精度在2γ波段中为0.026像素,通过移动平均滤波器(N = 7)通过OJFM获得的实际精度为36 nm。

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