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首页> 外文期刊>Optica applicata >Hybrid sol-gel-glaze planar optical waveguides on LTCC substrate - preliminary works
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Hybrid sol-gel-glaze planar optical waveguides on LTCC substrate - preliminary works

机译:LTCC基板上的混合溶胶-凝胶-釉料平面光波导-初步工作

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Preliminary works on optical planar waveguides made from two different materials on LTCC (low temperature cofired ceramic) substrates have been presented. Sol-gel-derived silica and glaze layers were used to prepare the waveguide structure. This kind of component can be used in integrated optoelectronics devices, which implicates a higher scale of integration and reliability. Furthermore, thanks to this method, it is possible to connect passive components made in thick-film technology with planar optical waveguides on one substrate. Described structures can be used in many devices. The most interesting is their application in sensors with optical detection, telecommunication elements, e.g. optical switches or devices called "lab-on-chip". The main aim of the research was to develop a new method of producing optical planar waveguides. Choosing the best materials for both types of layers was made in the first part of the investigation. Very important is the compatibility of the materials and the interaction with LTCC substrate, especially during firing. This kind of test was made. The paper presents the results of experiments for choosing the best type of glaze from four low temperatures, and transparent types of them. Verification of interactions between a silica layer and a glaze determines the best process parameters. Optimization of a waveguide size and shape is described as well.
机译:已经提出了在LTCC(低温共烧陶瓷)基板上由两种不同材料制成的光学平面波导的初步工作。溶胶-凝胶衍生的二氧化硅和釉层用于制备波导结构。这种组件可用于集成光电设备,这意味着更高的集成度和可靠性。此外,由于这种方法,可以将厚膜技术制造的无源组件与一个基板上的平面光波导连接起来。所描述的结构可以在许多设备中使用。最有趣的是它们在带有光学检测,电信元件的传感器中的应用。光学开关或称为“芯片实验室”的设备。该研究的主要目的是开发一种生产光学平面波导的新方法。在调查的第一部分中,为两种类型的层选择了最佳材料。材料的相容性以及与LTCC基材的相互作用非常重要,尤其是在烧制过程中。进行了这种测试。本文介绍了从四种低温和透明型低温中选择最佳釉料的实验结果。二氧化硅层和釉料之间相互作用的验证确定了最佳工艺参数。还描述了波导尺寸和形状的优化。

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