Highly selective diamond and β-SiC crystal formation at increased atomic hydrogen concentration: A route for synthesis of high-quality and patterned hybrid diamond/β-SiC composite film

Hao Zhuang; Lei Zhang; Thorsten Staedler

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Highly selective diamond and β-SiC crystal formation at increased atomic hydrogen concentration: A route for synthesis of high-quality and patterned hybrid diamond/β-SiC composite film

机译：原子氢浓度增加时高选择性金刚石和β-SiC晶体的形成：合成高质量且有图案的杂化金刚石/β-SiC复合膜的途径

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Utilizing a high atomic hydrogen concentration, highly selective formation of micrometer-sized diamond and B-SiC crystals is achieved in a microwave plasma chemical vapour deposition process. The high atomic hydrogen concentration, generated by a high microwave power density, hinders secondary heterogeneous nucleation and therefore enhances the selectivity of CH_3 and SiH_3 deposition onto diamond and P-SiC crystals, respectively. Based on experimental observation, an H-induced selective growth model is proposed that explains the mechanisms.

机译：利用高原子氢浓度，可以在微波等离子体化学气相沉积工艺中选择性地形成微米级金刚石和B-SiC晶体。高微波功率密度产生的高原子氢浓度阻碍了二次异质成核，因此分别提高了CH_3和SiH_3沉积在金刚石和P-SiC晶体上的选择性。在实验观察的基础上，提出了一种H诱导的选择性生长模型来解释其机理。

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来源
《Scripta materialia》 |2011年第6期|共4页
作者
Hao Zhuang; Lei Zhang; Thorsten Staedler;
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原文格式 PDF
正文语种 eng
中图分类冶金工业;
关键词
Chemical vapour deposition; Diamond; Composite films; Growth mechanism;

机译：化学气相沉积;金刚石;复合膜;生长机理;

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专利

1. Highly selective diamond and β-SiC crystal formation at increased atomic hydrogen concentration: A route for synthesis of high-quality and patterned hybrid diamond/β-SiC composite film [J] . Hao Zhuang, Lei Zhang, Thorsten Staedler Scripta materialia . 2011,第6期

机译：原子氢浓度增加时高选择性金刚石和β-SiC晶体的形成：合成高质量且有图案的杂化金刚石/β-SiC复合膜的途径
2. One step deposition of highly adhesive diamond films on cemented carbide substrates via diamond/beta-SiC composite interlayers [J] . Wang Tao, Zhuang Hao, Jiang Xin Applied Surface Science . 2015,第DECa30期

机译：通过金刚石/β-SiC复合中间层在硬质合金衬底上一步沉积高粘性金刚石膜
3. Nanocrystalline diamond/beta-SiC composite interlayers for the deposition of continuous diamond films on W and Mo substrate materials [J] . Vadali VSSS, Abu Samra H, Staedler T, Surface & Coatings Technology . 2007,第22a23期

机译：纳米晶金刚石/β-SiC复合中间层，用于在W和Mo衬底材料上沉积连续金刚石膜
4. A REVIEW OF NANOCRYSTALLINE DIAMOND/β-SiC COMPOSITE FILMS [C] . Vadali. V. S. S. Srikanth, Thorsten Staedler, Xin Jiang Ceramic materials and components for energy and environmental applications . 2010

机译：纳米金刚石/β-SiC复合薄膜的研究进展
5. Growth and characterization of diamond-like carbon and diamond films: Effect of atomic hydrogen beams and studies of field emission of electrons. [D] . Stavrides, Alexander P. 2000

机译：类金刚石碳膜和金刚石膜的生长和特征：原子氢束的作用和电子场发射的研究。
6. Synthesis and Characterization of Hydrogenated Diamond-Like Carbon (HDLC) Nanocomposite Films with Metal (Ag Cu) Nanoparticles [O] . Loukas Koutsokeras, Marios Constantinou, Petros Nikolaou, 2020

机译：金属（AgCu）纳米粒子的氢化类金刚石碳（HDLC）纳米复合薄膜的合成与表征
7. Wear of Polycrystalline Diamond Tool in Cutting of SiC Grain Reinforced Plastic. Influence of Grain Sizes of SiC and Diamond. [O] . Katsumi YAMAGUCHI, Jamal El-Deen AFAGHANI, Takeshi NAKAMOTO, 1996

机译：SiC晶粒增强塑料切割的多晶金刚石工具的磨损。 SiC和钻石粒度的影响。
8. Synthesis of Ceramics from Solutions: Functionally Graded Composites,NanoComposites and Single Crystal Thin Films. Epitaxial Growth and Structure of Highly Mismatched Oxide Films with Rock-Salt Structure on MgO [R] . Langjahr, P. A., Wagner, T., Lange, F. F., 1997

机译：从溶液中合成陶瓷：功能梯度复合材料，纳米复合材料和单晶薄膜。 mgO上岩盐结构高度错配氧化膜的外延生长和结构

Highly selective diamond and β-SiC crystal formation at increased atomic hydrogen concentration: A route for synthesis of high-quality and patterned hybrid diamond/β-SiC composite film

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