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首页> 外文期刊>Sensors and Actuators, A. Physical >Study of mechanical properties of RF MEMS switches by nanoindentation: Characterization and modeling of electro-mechanical behavior
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Study of mechanical properties of RF MEMS switches by nanoindentation: Characterization and modeling of electro-mechanical behavior

机译：通过纳米压痕研究RF MEMS开关的机械性能：机电行为的表征和建模

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This paper presents a thorough methodology to evaluate the mechanical properties of RF MEMS switches. It includes an analytical electro-mechanical model and nanoindentation characterizations which allow explaining the electrostatic behavior of the MEMS switches. Experimental and theoretical aspects are compared through two runs of ohmic electrostatic switches which are different from geometric and process flow standpoint. The switch is modeled as a clamped-clamped beam with mobile vertical loads, two stretching axial forces and two reaction moments in the anchors. The mechanical properties are characterized by nanoindentation technique; specific test protocol for measuring very low stiffness has been specially implemented with an adapted continuous stiffness measurement method. The measured values of the stiffness at the membrane center are respectively 79 and 137 N/m for the two runs, and they remain in good agreement with the theoretical model. The difference between these two runs is explained by the difference of the tensile residual stress. Moreover, the nanoindentation data turn out to be useful to evaluate the contact quality: dimple deformation due to twisting of the beam (contact in multiple steps), or inhomogeneous surface (stiffness is increasing while in contact). The fitted model is also used to approximate the restoring and contact forces and to point out the influence of the mechanical properties on the electrostatic behavior. A simple model with two parallel-plate capacitors in parallel, used for calculation of the up- and down-state capacitances, shows no discrepancy with experimental values. Finally, it may be concluded that the electrostatic behavior of the switches (pull-in voltage, up- and down-state capacitances, and probability of stiction) can be better understood thanks to the mechanical characterizations made by nanoindentation.
机译：本文提出了一种全面的方法来评估RF MEMS开关的机械性能。它包括一个机电分析模型和纳米压痕特征，可以解释MEMS开关的静电行为。通过两次运行的欧姆静电开关，从几何和工艺流程的角度进行了比较，比较了实验和理论方面。开关建模为具有移动垂直载荷，两个拉伸轴向力和锚固件中两个反作用力矩的夹紧梁。力学性能通过纳米压痕技术表征。用于测量极低刚度的特定测试协议已通过一种经过改进的连续刚度测量方法特别实施。两次运行的膜中心刚度的测量值分别为79 N / m和137 N / m，它们与理论模型保持良好的一致性。这两个行程之间的差异由拉伸残余应力的差异解释。此外，纳米压痕数据可用于评估接触质量：由于光束扭曲（多个步骤接触）引起的凹痕变形，或表面不均匀（接触时刚度增加）。拟合模型还用于估计恢复力和接触力，并指出机械性能对静电行为的影响。一个简单的模型，该模型具有两个并联的平行板电容器，用于计算上，下状态电容，与实验值没有差异。最后，可以得出结论，由于纳米压痕的机械特性，可以更好地理解开关的静电行为（吸合电压，向上和向下状态的电容以及静摩擦的可能性）。

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