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The Influence of Hydrogen Plasma on the Electroreflectance Spectrum and the Spectrum of Electron States of Porous Silicon

机译:氢等离子体对多孔硅的电反射光谱和电子态谱的影响

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摘要

Porous Si samples were investigated by the electroreflectance modulation spectroscopy. The presence of minibands, which are responsible for the existence of photoluminescence bands (red, green, and blue), is revealed. It is established that the miniband responsible for the blue band vanishes upon the treatment of a porous Si surface in H~+ plasma. Passivation of the surface with hydrogen also lads to strain relaxation both in porous films and in the Si substrate. The origin of electron states in the band gap of Si nanocrystallites is established.
机译:通过电反射调制光谱法研究了多孔硅样品。揭示了微带的存在,微带负责光致发光带(红色,绿色和蓝色)的存在。可以确定的是,在H〜+等离子体中对多孔Si表面进行处理后,导致蓝带的微带消失了。用氢对表面进行钝化也可以使多孔膜和硅衬底中的应变松弛。建立了硅纳米微晶带隙中电子态的起源。

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