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Modeling and control of a novel piezoelectric actuated precision fast positioning system

机译：新型压电致动精密快速定位系统的建模与控制

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摘要

The need for a precision fast positioning technique is drawing significant attention from optical engineering, semiconductor industry, biotechnology, and nanotechnology, etc. This paper presents a novel piezoelectric ( PZT) actuated precision fast positioning system (PFPS), which consists of a control module, PZT driving module, a precision fast positioning mechanism (PFPM), and a micro-displacement measure module. It controls the tilt and piston movements quickly and precisely. The driving, mechanism and measure integrative model of the PFPS has been built. The methods of digital proportional integral differential (PID) feedback control and self-tuning fuzzy PID control are studied. Simulation results prove that the proposed self-tuning fuzzy PID controller has good dynamic and static performances. A dynamic performance test system has been established. The experimental results confirm the validity of the design and the theoretical analysis of the PFPS.
机译：对精密快速定位技术的需求引起了光学工程，半导体工业，生物技术和纳米技术等领域的广泛关注。本文提出了一种新型的压电（PZT）驱动的精密快速定位系统（PFPS），该系统由一个控制模块组成，PZT驱动模块，精密快速定位机构（PFPM）和微位移测量模块。它可以快速而精确地控制倾斜和活塞运动。建立了PFPS的驱动，机理和措施集成模型。研究了数字比例积分微分（PID）反馈控制和自整定模糊PID控制的方法。仿真结果表明，所提出的自整定模糊PID控制器具有良好的动态和静态性能。建立了动态​​性能测试系统。实验结果证实了PFPS的设计和理论分析的正确性。

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