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Acoustic wave sensors: design, sensing mechanisms and applications

机译:声波传感器:设计,传感机制和应用

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摘要

Acoustic waves are currently being used in a wide range of sensor fields including physical sensing, chemical sensing and biosensing. Their implementation requires specific knowledge of materials, acoustic wave properties, device design and the sensing mechanisms involved for a wide range of applications. In this paper, the authors report on commonly used acoustic wave devices in sensor applications as well as the design techniques and fabrication processes. Sensing mechanisms and a portable sensor array system are described. The development of IC-based processes, thin-film deposition and sensitive layer fixation will allow for the integration of a total physical and chemical analysis system in the one IC package, leading to the evolution of smart sensors.
机译:声波目前正在广泛的传感器领域中使用,包括物理传感,化学传感和生物传感。它们的实现需要对材料,声波特性,设备设计以及广泛应用涉及的传感机制有特定的了解。在本文中,作者报告了传感器应用中常用的声波设备以及设计技术和制造过程。描述了传感机构和便携式传感器阵列系统。基于IC的工艺,薄膜沉积和敏感层固定的发展将使整个物理和化学分析系统集成在一个IC封装中,从而导致智能传感器的发展。

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