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Self-suspended vibration-driven energy harvesting chip for power density maximization

机译：自悬浮振动驱动能量采集芯片，可最大程度地提高功率密度

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摘要

This work introduces a new concept to integrate energy-harvesting devices with the aim of improving their throughput, mainly in terms of scavenged energy density and frequency tunability. This concept, named energy harvester in package (EHiP), is focused on the heterogeneous integration of a MEMS die, dedicated to scavenging energy, with an auxiliary chip, which can include the control and power management circuitry, sensors and RF transmission capabilities. The main advantages are that the whole die can be used as an inertial mass and the chip area usage is optimized. Based on this concept, in this paper we describe the development and characterization of a MEMS die fully dedicated to harvesting mechanical energy from ambient vibrations through an electrostatic transduction. A test PCB has been fabricated to perform the assembly that allows measurement of the resonance motion of the whole system at 289 Hz. An estimated maximum generated power of around 11 mu W has been obtained for an input vibration acceleration of similar to 10 m s(-2) when the energy harvester operates in a constant-charge cycle for the best-case scenario. Therefore, a maximum scavenged power density of 0.85 mWcm(-3) is theoretically expected for the assembled system. These results demonstrate that the generated power density of any vibration-based energy harvester can be significantly increased by applying the EHiP concept, which could become an industrial standard for manufacturing this kind of system, independently of the transduction type, fabrication technology or application.
机译：这项工作引入了一个新概念，以集成能量收集设备为目标，以提高其吞吐量，主要是在消除能量密度和频率可调性方面。这个称为封装中的能量收集器（EHiP）的概念专注于专用于清除能量的MEMS芯片与辅助芯片的异构集成，该辅助芯片可以包括控制和电源管理电路，传感器和RF传输功能。主要优点是整个芯片都可以用作惯性质量，并且芯片面积使用得到了优化。基于这一概念，在本文中，我们描述了完全专用于通过静电传导从环境振动中收集机械能的MEMS裸片的开发和特性。已经制造了一个测试PCB来执行组装，该组装允许测量整个系统在289 Hz下的共振运动。在最佳情况下，当能量采集器以恒定充电周期运行时，对于类似于10 m s（-2）的输入振动加速度，已获得大约11μW的估计最大发电功率。因此，理论上预计组装后的系统的最大扫气功率密度为0.85 mWcm（-3）。这些结果表明，通过应用EHiP概念可以显着提高任何基于振动的能量收集器的发电功率密度，EHiP概念可以成为制造此类系统的工业标准，而与换能类型，制造技术或应用无关。

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