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A millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output

机译：具有亚纳米级定位分辨率和大力输出的毫米级纳米操纵器

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摘要

Nanomanipulation in space-limited environments (e. g., inside a SEM (scanning electron microscope), and particularly in a TEM (transmission electron microscope)) requires small-sized nanomanipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nanomanipulator with a positioning resolution of 0.15 nm and a motion range of +/- 2.55 mu m. An amplification mechanism is employed to convert micrometer input displacements, generated by a conventional electrostatic comb-drive microactuator, into sub-nanometer output displacements. The device has a high load driving capability, driving a load as high as 98 mu N without sacrificing positioning performance. Based on the pseudo-rigid-body approach, closed-form analytical models of the minification ratio and stiffness of the amplification mechanism are developed. Finite element simulation and testing results verify that the theoretical models are valid with an error smaller than 6.2% and that the mechanism has a high linearity (+/- 2.4%). The amplification mechanism and analytical models have general applicability to other MEMS transducer designs. A capacitive displacement sensor is integrated for detecting input displacements that are converted into output displacements via the minification ratio, allowing closed-loop controlled nanomanipulation. The MEMS-based nanomanipulators are applicable to the characterization/manipulation of nanomaterials and construction of nanodevices.
机译：在空间有限的环境中（例如，在SEM（扫描电子显微镜）内部，尤其是在TEM（透射电子显微镜）内部）中的纳米操纵需要能够产生亚纳米定位分辨率和大输出力的小型纳米操纵器。本文报道了一种基于毫米级MEMS（微机电系统）的纳米操纵器，其定位分辨率为0.15 nm，运动范围为+/- 2.55μm。采用放大机构将由常规静电梳状驱动微致动器产生的微米输入位移转换为亚纳米输出位移。该器件具有很高的负载驱动能力，可在不牺牲定位性能的情况下驱动高达98μN的负载。基于伪刚体方法，建立了最小化比例和放大机构刚度的闭合形式分析模型。有限元仿真和测试结果验证了理论模型是有效的，误差小于6.2％，并且该机构具有很高的线性度（+/- 2.4％）。放大机制和分析模型普遍适用于其他MEMS换能器设计。集成了一个电容式位移传感器，用于检测输入位移，该位移通过最小化比率转换为输出位移，从而实现闭环控制的纳米操作。基于MEMS的纳米操纵器适用于纳米材料的表征/操纵和纳米器件的构造。

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