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首页> 外文期刊>Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion >0.76% absolute efficiency increase for screen-printed multicrystalline silicon solar cells with nanostructures by reactive ion etching
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0.76% absolute efficiency increase for screen-printed multicrystalline silicon solar cells with nanostructures by reactive ion etching

机译：通过反应性离子蚀刻，具有纳米结构的丝网印刷多晶硅太阳能电池的绝对效率提高0.76％

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In this study, the reactive ion etching in combination with alkaline etching was employed to texture the surface of a 156 x 156 mm(2) multi-crystalline silicon wafers to reduce their solar reflectivity and improve conversion efficiency. Reactive gases comprising chlorine (Cl-2), sulfur hexafluoride (SF6) and oxygen (O-2), were activated in the radio-frequency (rf) plasma to fabricate pyramids in an reactive ion etching (RIE) system. The multi-crystalline Si substrates were etched in various compositions of gases to form the nanostructures of various shapes. Besides the nanoscale features, the high density of nanostructures formed on the multi-crystalline Si surface was also required to significantly reduce the reflectivity. A low reflectivity surface was successfully fabricated with the average reflectivity significantly reduced down to <2% for the wavelength range of 300-850 nm. The short wavelength spectral response (blue response) improvement is observed in RIE textured solar cells compared to the standard textured cells. The RIE textured surfaces in combination with optimized emitter resistance result in a remarkable enhancement of short circuit current density. Compared with the acidic textured solar cells, the absolute conversion efficiency of the alkaline+RIE textured cells was improved by 0.76% in average. (C) 2016 Published by Elsevier B.V.
机译：在这项研究中，将反应性离子蚀刻与碱性蚀刻相结合，可以使156 x 156 mm（2）的多晶硅晶片的表面纹理化，以降低其太阳光反射率并提高转换效率。包含氯气（Cl-2），六氟化硫（SF6）和氧气（O-2）的反应气体在射频（rf）等离子体中被活化，从而在反应离子蚀刻（RIE）系统中制造出金字塔形。在各种气体组成中蚀刻多晶Si衬底，以形成各种形状的纳米结构。除了纳米级特征之外，还需要在多晶硅表面上形成的高密度纳米结构以显着降低反射率。成功制造了低反射率表面，在300-850 nm波长范围内，平均反射率显着降低至<2％。与标准纹理化电池相比，在RIE纹理化太阳能电池中观察到了短波长光谱响应（蓝色响应）的改善。 RIE质感表面与优化的发射极电阻相结合，大大提高了短路电流密度。与酸性织构太阳能电池相比，碱性+ RIE织构电池的绝对转换效率平均提高了0.76％。 （C）2016由Elsevier B.V.发布

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