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Measurement of Surface Shape and Position by Phase-Shifting Digital Holography

机译：通过相移数字全息术测量表面形状和位置

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Phase-shifting digital holography is applied to measure the shapes and positions of rough surfaces from the averaged conjugate product of the reconstructed complex amplitudes, named complex coherence factor, corresponding to dual wavelengths. The phase of the averaged product at the object plane provides the shape of the surface, whereas the peak position of the modulus with respect to reconstruction distance provides the position of the surface. The phase is almost free from speckle noise and easy to be unwrapped. The resultant resolution of surface shape amounts to a few tens of micrometres. The sensitivity of the position measurement that requires no marking on the object is several per cent of object distance from a charge-coupled device (CCD). The method corresponds to the detection of the position of maximum contrast of the fringes to be observed in conventional holographic interferometry. It makes use of fringe phase for shape measurement and fringe contrast for position measurement. Both the theory explaining the principle and experimental results are presented.
机译：应用相移数字全息术从重构的复振幅的平均共轭乘积（称为复相干因子，对应于双波长）测量粗糙表面的形状和位置。物平面上的平均乘积的相位提供了表面的形状，而模量相对于重构距离的峰值位置提供了表面的位置。该相位几乎没有斑点噪声，并且易于解开。表面形状的最终分辨率达几十微米。不需要在物体上打标的位置测量的灵敏度为距电荷耦合器件（CCD）的物体距离的百分之几。该方法对应于在常规全息干涉术中要观察的条纹的最大对比度的位置的检测。它使用条纹相位进行形状测量，并使用条纹对比度进行位置测量。提出了解释原理的原理和实验结果。

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