Dynamical equivalent-circuit modeling of MEMS with squeezed gas film damping

Westby E.; Fjeldly TA.

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Dynamical equivalent-circuit modeling of MEMS with squeezed gas film damping

机译：具有压缩气膜阻尼的MEMS动态等效电路建模

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We investigate the properties of equivalent-circuit models of squeezed gas film damping. The equivalent may be represented by an infinite ladder-like circuit, with the elements described analytically We have developed an approximate representation of the ladder which only requires a small number of elements. This is done through a careful selection of elements and including suitable weighting factors. Finally, we classify some mass/spring systems and discuss what consequences the different systems will have upon the modeling. [References: 5]

机译：我们研究了压缩气膜阻尼等效电路模型的特性。等效电路可以用无限的梯形电路表示，其中的元素经过分析描述。我们已经开发出了只需要少量元素的梯形近似表示。这是通过仔细选择元素并包括适当的加权因子来完成的。最后，我们对一些质量/弹簧系统进行分类，并讨论不同系统将对建模产生什么影响。 [参考：5]

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《Physica Scripta: An International Journal for Experimental and Theoretical Physics》 |2002年第0期|共4页
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Westby E.; Fjeldly TA.;
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中图分类物理学;
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1. Dynamical equivalent-circuit modeling of MEMS with squeezed gas film damping [J] . Westby E., Fjeldly TA. Physica Scripta: An International Journal for Experimental and Theoretical Physics . 2002,第0期

机译：具有压缩气膜阻尼的MEMS动态等效电路建模
2. SLIDE FILM DAMPING AND SQUEEZE FILM DAMPING MODELS CONSIDERING GAS RAREFACTION EFFECTS FOR MEMS DEVICES [J] . ANDOJO ONGKODJOJO, FRANCIS E. H. TAY International Journal of Computational Engineering Science(IJCES) . 2003,第2期

机译：考虑MEMS设备的气体反射效应的滑动膜阻尼和挤压膜阻尼模型
3. Dynamics and squeeze film gas damping of a capacitive RF MEMS switch [J] . Steeneken PG, Rijks TGSM, van Beek JTM, Journal of Micromechanics and Microengineering . 2005,第1期

机译：电容式RF MEMS开关的动态特性和压缩薄膜气体阻尼
4. EXPERIMENTAL VERIFICATION OF RAREFIED GAS SQUEEZED-FILM DAMPING MODELS USED IN MEMS [C] . Lukas Mol, Luis A. Rocha, Edmond Cretu, ASME International Mechanical Engineering Congress and Exposition . 2007

机译：MEMS中使用的稀土气挤压膜阻尼模型的实验验证
5. EFFECT OF FLUID INERTIA ON SQUEEZE FILM DAMPER FORCE RESPONSE (BEARINGS, ROFORDYNAMICS, LUBRICATION THEORY, DAMPING) [D] . SAN ANDRES ALVARES, LUIS ALBERTO. 1985

机译：流体惯性对挤压膜阻尼力响应的影响（轴承，ROFORDYNAMICS，润滑理论，阻尼）
6. Nonlinear Dynamics and Chaos of Microcantilever-Based TM-AFMs with Squeeze Film Damping Effects [O] . Wen-Ming Zhang, Guang Meng, Jian-Bin Zhou, 2009

机译：具有挤压膜阻尼效应的基于微悬臂梁的TM-AFM的非线性动力学和混沌
7. Dynamics and squeeze film gas damping of a capacitive RF MEMS switch [O] . P. G. Steeneken, Th. G. S. M. Rijks, J. T. M. Van Beek, 2015

机译：电容式RF mEms开关的动态和挤压薄膜气体阻尼

Dynamical equivalent-circuit modeling of MEMS with squeezed gas film damping

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