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Formation of stable N-V-O complexes in Si

机译:Si中稳定的N-V-O配合物的形成

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We have investigated complexes formed by nitrogen (N), vacancy (V), and oxygen (O) in Si by using first-principles calculations to reveal the N-doping effect on formation processes of oxygen precipitates in Si. We considered coupling of an O atom with a {N-2-V-2} complex, which is thought to be the most stable complex in Si. The calculated results show that the {N-2-V-2} Complex effectively captures an O atom, forming stable {N-2-V-2-O} complexes. Such stable complexes may become the heterogeneous nucleation sites of O precipitates. As a result, the N-doping drives the aggregation of O. This is consistent with the experimentally observed enhancement of 0 precipitate formation due to the N-doping. (C) 2003 Published by Elsevier B.V. [References: 25]
机译:我们已经通过使用第一性原理计算研究了氮(N),空位(V)和氧(O)在硅中形成的络合物,以揭示氮掺杂对硅中氧沉淀形成过程的影响。我们考虑了O原子与{N-2-V-2}配合物的偶联,该配合物被认为是Si中最稳定的配合物。计算结果表明,{N-2-V-2}络合物可有效捕获O原子,形成稳定的{N-2-V-2-O}络合物。这种稳定的复合物可能成为O沉淀的异质成核位点。结果,N掺杂驱动O的聚集。这与由于N掺杂而在实验中观察到的0沉淀物形成的增强相一致。 (C)2003年由Elsevier B.V.出版[参考:25]

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