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首页> 外文期刊>Physica, B. Condensed Matter >Impact of induced lattice defects on performance degradation of AlGaAs/GaAs p-HEMTs
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Impact of induced lattice defects on performance degradation of AlGaAs/GaAs p-HEMTs

机译:诱导晶格缺陷对AlGaAs / GaAs p-HEMTs性能下降的影响

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摘要

Irradiation damage and its recovery behavior resulting from thermal annealing in AlGaAs/GaAs pseudomorphic HEMTs, subjected to 1-MeV electrons, 1-MeV fast neutrons and 220-MeV carbon, are studied. The drain current and effective mobility decrease after irradiation, while the threshold voltage increases in positive direction. The decrease of the mobility is thought to be due to the scattering of channel electrons with the induced lattice defects and also to the decrease of the electron density in the two-dimensional electron gas (2DEG) region.
机译:研究了在1MeV电子,1MeV快中子和220MeV碳的作用下,AlGaAs / GaAs伪晶HEMT中的热退火引起的辐照损伤及其恢复行为。辐射后漏极电流和有效迁移率降低,而阈值电压沿正方向增加。迁移率的降低被认为是由于具有诱导的晶格缺陷的沟道电子的散射以及二维电子气(2DEG)区域中电子密度的降低。

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