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首页> 外文期刊>Physica, B. Condensed Matter >Multilayers for the EUV/soft X-ray range
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Multilayers for the EUV/soft X-ray range

机译：适用于EUV /软X射线范围的多层

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An experimental survey of the performance of multilayer systems for the soft X-ray range with special emphasis on the water window is presented. The multilayers have been designed as high reflectance normal incidence mirrors and, for polarimetry purposes, as detectors for circularly polarised synchrotron radiation, respectively. Multilayers with spacer materials of Si, B, C, or the transition metals Sc, Ti, V, Cr in combination with the absorber materials Fe, Co, Ni and W were investigated. At the Is and 2p absorption edges, respectively, they show a strong resonant enhancement of the reflectance due to anomalous dispersion. By tailoring the layer thickness and the thickness ratio for use at and below the resonance energy in normal incidence (theta = 90 degrees) or at theta = 45 degrees, an excellent performance with respect to reflectance, transmission and polarisance, respectively, in the water window was achieved for multilayers with period thicknesses down to 1.4 nm. (C) 2000 Elsevier Science B.V. All rights reserved. [References: 41]
机译：提出了针对软X射线范围的多层系统性能的实验研究，其中特别强调了水窗。多层已经被设计为高反射率法向入射镜，并且出于极化测定的目的，分别被设计成用于圆偏振同步加速器辐射的检测器。研究了具有Si，B，C或过渡金属Sc，Ti，V，Cr的间隔层材料以及吸收剂材料Fe，Co，Ni和W的多层。由于异常色散，分别在Is和2p吸收边缘处，它们显示出反射率的强共振增强。通过调整法向入射角（θ= 90度）或θ= 45度时在共振能量以下的层厚度和厚度比，分别在水中的反射率，透射率和极化率方面表现出色周期厚度低至1.4 nm的多层膜实现了窗口化。 （C）2000 Elsevier Science B.V.保留所有权利。 [参考：41]

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