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首页> 外文期刊>Physica, C. Superconductivity and its applications >Microwave property of YBCO film grown with two-step process
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Microwave property of YBCO film grown with two-step process

机译：两步法生长的YBCO薄膜的微波性能

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High temperature superconducting (HTS) YBCO films were deposited on (100) MgO substrates by pulsed laser deposition. From variation of orientation in YBCO films depending on thickness and deposition temperature, two-step process was introduced for property enhancement and the use of low fabrication temperature. YBCO films deposited by two-step process showed fully c-axis orientation without a-axis component and superconductive transition temperature of 89 K. In order to investigate microwave property, ring resonator with center frequency of 9.45 GHz was designed and fabricated by pattering YBCO films deposited at 700 degrees C, 750 degrees C and two-step process. YBCO ring resonator with only c-axis component deposited at 750 degrees C and two-step process showed better microwave property than YBCO resonator with mixture of a-axis and c-axis component deposited at 700 degrees C. In case of YBCO ring resonator using two-step process, insertion loss and Q-factor were about 2.3 dB and 240 at 77 K. (c) 2005 Elsevier B.V. All rights reserved.
机译：通过脉冲激光沉积将高温超导（HTS）YBCO膜沉积在（100）MgO衬底上。由于YBCO薄膜的取向随厚度和沉积温度的不同而变化，因此引入了两步工艺以提高性能并降低制造温度。通过两步法沉积的YBCO膜表现出完全的c轴取向，无a轴分量，超导转变温度为89K。为研究微波性能，通过构图YBCO膜设计并制造了中心频率为9.45 GHz的环形谐振器。在700摄氏度，750摄氏度和两步过程中沉积。与仅在700摄氏度下沉积a轴和c轴成分混合的YBCO共振器相比，仅在750摄氏度下沉积c轴成分的YBCO环形共振器表现出更好的微波性能。两步过程，在77 K时插入损耗和Q因子分别约为2.3 dB和240。（c）2005 Elsevier BV保留所有权利。

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