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Comparison of the Picosecond Characteristics of Silicon and Silicon-on-SapphireMetal-Semiconductor-Metal Photodiodes

机译:硅和硅 - 蓝宝石金属 - 半导体 - 金属光电二极管的皮秒特性的比较

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The picosecond characteristics of silicon-based metal-semiconductor-metal (MSM)diodes with submicrometer finger spacing and width were studied. Diodes made on both bulk silicon and silicon-on-sapphire (SOS) substrates were measured by a subpicosecond electro-optic sampling system. The response of bulk-silicon MSM diodes was strongly dependent on the wavelength of the excitation light because of the change in penetration depth. The response of SOS diodes, on the other hand. had a weak dependence on wavelength since the thickness of the silicon layer limits the depth of photogenerated carriers. The response of a 200 nm SOS

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