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Laser-Induced Metal Deposition and Laser Cutting Techniques for Fixing IC DesignErrors

机译：激光诱导金属沉积和激光切割技术修复IC设计错误

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摘要

The local modification of an integrated circuit (IC) requires in general theavailability of three generic processes. First a method for cutting conductors must be provided. Second, a process for depositing new conductors must be available. Finally, a means of opening via holes through the chip passivation to the underlying conductors is needed; this operation enables newly deposited conductors to make connections to the existing circuit elements, and also provides probe to facilitate testing of the circuit. In this paper we present laser-based techniques that perform these three functions, and describe the operation of a versatile tool that we have constructed and applied to the repair of ICs.

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作者
Shaver, D. C.; Doran, S. P.; Rothschild, M.; Sedlacek, J. H.;
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年度 1991
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总页数 7
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Integrated circuits; Modification; Openings; Repair; Reprints;

机译：集成电路;修改;开口;修理;重印;

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1. Real-time measurement of trace metals on fine particles by laser-induced plasma techniques [J] . Cheng Meng-Dawn Fuel Processing Technology . 2000,第3期

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2. Laser-induced chemical liquid phase deposition of metals: chemical reactions in solution and activation of dielectric surfaces [J] . V A Kochemirovsky, L G Menchikov, S V Safonov Russian Chemical Reviews: Reviews on Current Topics in Chemistry . 2011,第9期

机译：金属的激光诱导化学液相沉积：溶液中的化学反应和介电表面的活化
3. In situ laser-induced codeposition of copper and different metals for fabrication of microcomposite sensor-active materials [J] . Smikhovskaia Alexandra V, Panov Maxim S., Tumkin Ilya I., Analytica chimica acta . 2018,第期

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4. Laser-induced metal deposition and laser cutting techniques for fixing IC design errors [C] . David C. Shaver, Lincoln Lab./MIT, Lexington, Metallization: Performance and Reliability Issues for VLSI and ULSI . 1991

机译：激光感应金属沉积和激光切割技术可解决IC设计错误
5. Predictive modeling, simulation, and optimization of laser processing techniques: UV nanosecond-pulsed laser micromachining of polymers and selective laser melting of powder metals. [D] . Criales Escobar, Luis Ernesto. 2016

机译：激光加工技术的预测建模，仿真和优化：聚合物的UV纳秒脉冲激光微加工和粉末金属的选择性激光熔化。
6. Deposition of Durable Micro Copper Patterns into Glass by Combining Laser-Induced Backside Wet Etching and Laser-Induced Chemical Liquid Phase Deposition Methods [O] . Jae Min Seo, Kui-Kam Kwon, Ki Young Song, 2020

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7. The Technology of Laser-Induced Deposition of Nanostructured Metallic Conductors on the Dielectric Substrate [O] . Semenok D.V., Safonov S.V., Kochemirovsky V. 2012

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8. Laser-Induced Metal Deposition on Semiconductors from Liquid Electrolytes [R] . Nanai, L., Hevesi, I., Bunkin, F. V., 1988

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Laser-Induced Metal Deposition and Laser Cutting Techniques for Fixing IC DesignErrors

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