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E-beam Testing and Evaluation of Superpolished High Quality Developmental Mirrors

机译：超抛光高质量发展镜的电子束测试与评估

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The technical tasks for this program have been divided into two main phases.Phase I involves all equipment refits and system qualification tests necessary for the addition of advanced capabilities (i.e., interferometry and cryo-deposit deposition/monitoring). This phase has been scheduled during the first full year of the contract period. Phase II, during the remaining two years, has been

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年度 1990
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总页数 111
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Mirrors; Test methods; Electron beams; Feasibility studies; Acceptance tests; Facilities; Vacuum chambers; Interferometry; Scheduling; Qualifications; System safety; Checkout procedures; Scatterometers; Electrolytic polishing; High speed cameras;

机译：镜子;测试方法;电子束;可行性研究;验收测试;设施;真空室;干涉测量;调度;资格;系统安全;检验程序;散射仪;电解抛光;高速摄像机;

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E-beam Testing and Evaluation of Superpolished High Quality Developmental Mirrors

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