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Nonreciprocal Laser-Microchemical Processing. Spatial Resolution Limits and Demonstration of 0.2 Micrometers Linedwidths

机译：非互易激光 - 微量化学处理。 0.2微米带宽的空间分辨率限制和演示

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Ehrlich, D. J.; Tsao, J. Y.;
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年度 1984
页码 p.1-4
总页数 4
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Mathematical models; Laser beams; Spatial distribution; Processing; Fabrication; Nonlinear systems; Reprints;

机译：数学模型;激光束;空间分布;加工;制造;非线性系统;重印;

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8. Nonreciprocal Laser-Microchemical Processing. Spatial Resolution Limits and Demonstration of 0.2 Micrometers Linedwidths. [R] . Ehrlich, D. J., Tsao, J. Y. 1984

机译：非互易激光 - 微量化学处理。 0.2微米带宽的空间分辨率限制和演示。

Nonreciprocal Laser-Microchemical Processing. Spatial Resolution Limits and Demonstration of 0.2 Micrometers Linedwidths

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