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Ruled Gratings for X-Ray and Far Ultraviolet Spectra

机译:用于X射线和远紫外光谱的刻划光栅

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A new process for making ruled gratings is described. A protective film of molybdenum and gold of about 300 A is sputtered on blanks of glass or quartz. A sharp pointed diamond properly loaded is used to cut a fine ruling through the protective film and slightly into the blank. Hydrofluoric acid is then used to etch a groove of the required depth and width. The grating is then coated with a reflectance coating of gold or platinum to increase its efficiency. With close control of the ratio of flat to groove width, one should be able to make a grating which maximizes intensity for a desired order and minimizes it for other selected neighboring orders. Technical details on various parts of the process are described. (Author)

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