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Self-Assembly Based Approaches to Microelectronic Fabrication and Devices:Surface Passivation, Soft Lithography, Electrically Functional Systems, and Hierarchical Self-Assembly

机译：基于自组装的微电子制造和器件方法：表面钝化，软光刻，电功能系统和分层自组装

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作者
Allara, D.; Maracas, G.; Reed, M.; Tour, J.; Whitesides, G.;
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年度 1997
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总页数 48
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Microelectronics; Computer aided manufacturing; Gallium arsenides; Field effecttransistors; Semiconductors; Lithography; Molecule molecule interactions; Research management; Oligomers; Nanotechnology;

机译：微电子学;计算机辅助制造;砷化镓;场效应晶体管;半导体;光刻;分子分子相互作用;研究管理;低聚物;纳米技术;

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1. Toward three-dimensional microelectronic systems: Directed self-assembly of silicon microcubes via DNA surface functionalization [J] . Lammerhardt N., Merzsch S., Ledig J., Langmuir: The ACS Journal of Surfaces and Colloids . 2013,第26期

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2. Fabrication of 3D functionalized microstructure via scanning probe lithography and self-assembly methods [J] . Choi I, Kang SK, Lee J, Journal of nanoscience and nanotechnology . 2007,第11期

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3. Molecular Self-Assembly, Chemical Lithography, and Biochemical Tweezers: A Path for the Fabrication of Functional Nanometer-Scale Protein Arrays [J] . Audrey Turchanin, AH Tinazli, Mohamed El-Desawy, Advanced Materials . 2008,第3期

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5. Toward Hierarchical Material Design via Block Copolymers in a Protic Ionic Liquid: Self-assembly, Functionalization, Device Fabrication, and Commercialization [D] . Xie, Ru. 2018

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6. Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices [O] . Christian Pinto-Gómez, Francesc Pérez-Murano, Joan Bausells, 2020

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7. Fabrication and Functionalization of Nano-Micro Polymer Tubes by using ATRP/Self-assembly Tech nique and Immobilitzation of Gold pparticles onto Self-assembly modified Surfaces [O] . Kazemi Abbass, Greiner Andreas (Prof.) 2006

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Self-Assembly Based Approaches to Microelectronic Fabrication and Devices:Surface Passivation, Soft Lithography, Electrically Functional Systems, and Hierarchical Self-Assembly

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