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Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs.

机译：磁力显微镜/电流对比成像：一种用于IC内部电流探测的新技术。

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摘要

This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors (1). A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of (approximately) 1 mA dc and (approximately) 1 (mu)A ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.

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Campbell, A. N.; Cole, E. I.; Dodd, B. A.; Anderson, R. E.;
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年度 1993
页码 1-14
总页数 14
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Integrated Circuits; Data Acquisition Systems; Failure Mode Analysis; Image Processing; Magnetism; Microscopy; Physics; Probes; Spatial Resolution.; EDB/426000; EDB/440800;

机译：集成电路;数据采集系统;故障模式分析;图像处理;磁性;显微镜;物理;探头;空间分辨率; EDB / 426000; EDB / 440800;

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专利

1. Spatial and force resolution of magnetic force microscopy in current imaging [J] . F.Kral, G.Kostorz, N.Ari Czechoslovak Journal of Physics . 1999,第11期

机译：当前成像中磁力显微镜的空间和力分辨率
2. Location Of Current Carrying Failure Sites In Integrated Circuits By Magnetic Force Microscopy At Large Probe-to-sample Separation [J] . A. Pu, D.J. Thomson, G.E. Bridges Microelectronic Engineering . 2009,第1期

机译：大探针-样品分离下磁力显微镜在集成电路中载流故障点的位置
3. Sub-micron resolution magnetic force microscopy mapping of current paths with large probe-to-sample separation [J] . A. Pu, D. J. Thomson Measurement Science & Technology . 2007,第8期

机译：具有大的探针到样品分离的电流路径的亚微米分辨率磁力显微镜映射
4. Voltage-influence of biased interconnection line on integrated circuit-internal current contrast measurements via magnetic force microscopy [C] . R. Weber, W. Mertin, E. Kubalek European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis . 2000

机译：偏置互连线对集成电路内部电流对比度测量的电压 - 影响通过磁力显微镜
5. Scanning current spectroscopy: A conducting probe atomic force microscopy technique for exploring the physical and electronic properties of metal oxide/organic interfaces. [D] . Veneman, Peter Alexander. 2009

机译：扫描电流光谱法：一种传导探针原子力显微镜技术，用于探索金属氧化物/有机界面的物理和电子性质。
6. Magnetic Resonance Elastography and Other Magnetic Resonance Imaging Techniques in Chronic Liver Disease: Current Status and Future Directions [O] . Cher Heng Tan, Sudhakar Kundapur Venkatesh 2016

机译：磁共振弹性成像和其他磁共振成像技术在慢性肝病中的现状和未来方向
7. SCANNING CURRENT SPECTROSCOPY: A CONDUCTING PROBE ATOMIC FORCE MICROSCOPY TECHNIQUE FOR EXPLORING THE PHYSICAL AND ELECTRONIC PROPERTIES OF METAL OXIDE/ORGANIC INTERFACES [O] . Veneman Peter Alexander 2009

机译：扫描电流光谱：探测金属氧化物/有机界面的物理和电子性质的导电探针显微技术
8. Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs [R] . Campbell, A. N., Cole, E. I., Dodd, B. A., 1993

机译：磁力显微镜/电流对比成像：一种用于IC内部电流探测的新技术

Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs.

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