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Equations for Determining CVD Tungsten-Rhenium Alloy Composition and Plating Rate

机译:确定CVD钨铼合金成分和镀层速率的方程式

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The composition and plating rate of CVD tungsten-rhenium alloy, formed by hydrogen reduction of a tungsten and rhenium metal hexafluoride gas mixture on a heated substrate, depend on the substrate temperature, hydrogen gas flow, metal fluoride gas flow, and the pressure. An equation was derived that allows the alloy composition to be calculated for any combination of the variables, based on the measured composition for one set of the variables. Also, equations were derived from which the W-Re alloy plating rate can be calculated in terms of the measured rate and composition at one set of the variables, or, in terms of the measured rates at two sets of the variables, without knowledge of the composition. W-Re alloy compositions and plating rates calculated with the equations were compared with experimental data. (ERA citation 12:043516)

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